Compact, Barrel Type, Low Temperature Ashing Device
Features of Plasma Reactor (Barrel Chamber) (PR510)
- Designed with large chamber size made of quartz considered almost completely resistant against most plasma processes
- RF Power: Max. 500W
- Space-saving design with oscillation section integrated with a portion of the chamber
- Equipped with a large quartz chamber (φ215mm) which can process bigger testing samples
- Outstanding operability and safety by the automatic tuning system equipped as a standard function
Specifications
| Item Code | 215012 |
|---|---|
| Model | PR510 |
| System | DP mode, Barrel type |
| High Frequency Output | Max. 500W |
| Oscillation Frequency | 13.56MHz |
| Tuning Method | Automatic tuning |
| Reaction Chamber | Quartz φ215 × L305 mm x 1 chamber |
| Reaction Gas System | Dual system (oxygen/CF4) |
| Control System | Automatic touch panel |
| Piping Material | SUS, Teflon |
| External Dimensions | W520 × D630 × H760mm |
| Accessories | Connection cable: 1 set, Vacuum grease: 1 pc., O-ring for reaction chamber: 1 pc. |
| Internal dimensions（φ×D mm） | φ215×305mm |
| External dimensions（W×D×H mm） | 520×630×760mm |
| Remarks(dimensions) | 215φ x 305Dmm x 1 chamber |
| Power Source |
AC200VV 8 (15A)A Three phase |
| Weight | 60kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.
US 17301 
GB 13160 
CA 10238 
AU 6757 
IE 3241 
NZ 1783 
IN 1344 
RU 912 
