SPECIFICATIONS
- Range:4x4''-100x100mm XY Stage Travel Range, 11x11'' 280x280mm XY Stage Top Size
- Type:Measuring
- Accuracy:XY-axis:(2.2+0.02L)µm,L = Measuring length(mm) when not loaded, JIS B 7153
- Resolution:.0001''/.00005''/.00001'' / 0.001mm/0.0005mm/0.0001mm