Overview:
The EPX series uses a unique, patented, single-shaft regenerative/Holweck® stage mechanism that makes them capable of pumping from atmosphere to ultimate pressures of < 1x10-4 mbar or < 1x10-6mbar depending on model. They are ideal for applications where a better base pressure is required than can be delivered by a typical primary pump and where otherwise a turbomolecular pump and primary pump would be required and also for applications that cycle frequently from atmosphere to low pressures as they can operate continuously at all inlet pressures.

Features & Benefits:
Compact footprint – the EPX is more compact than the equivalent turbomolecular pump and primary pump combination. 
Low cost of ownership – zero routine maintenance with a 5 year service interval. 
Unique patent protected pumping mechanism – the EPX can pump down from atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures. No separate “rough pumping” required. 
Ultra clean mechanism – EPX pumps have no grease or oil under vacuum and present no other source of potential contamination. 
Extremely reliable – based on field proven IPX technology, the EPX has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump. 
Water cooled – low environmental heat load 
Low noise and vibration – better working environment. Ideal for vibration sensitive environments.

​Technical Data:

Peak speed	500 m3h-1
	295 ft3min-1
	8338 lmin-1
Ultimate vacuum
	<1 x 10-6 mbar
	<7 x 10-7 Torr
	<1 x 10-4 Pa
Warm-up time (to nominal performance)	30 min
Inlet flange	ISO160
Outlet flange	NW25
Noise	<59 dB(A)
Minimum cooling water flow rate	2 lmin-1
Cooling water temperature	15 – 35 °C
Electrical Supply	200/208 V, 50/60 Hz 3 phase
Power at ultimate	1.4 kW
Rated motor power	3.0 kW
TIM	C3
Weight	45.2 kg